SIGNALTEC
NON-INVASIVE SYSTEMS, NAMELY, COMPUTER SOFTWARE, INTRA-FAB SENSORS, AND ELECTRICAL DEVICES, NAMELY, RF-RADIOS, LOW-FREQUENCY RADIOS, BLUE-TOOTH DEVICE, SPREAD-SPECTRUM RADIOS, ALL ASSOCIATED WITH SEMICONDUCTOR FABRICATION FOR REMOTELY CONTROLLING, MONITORING AND DIAGNOSING POTENTIAL MALFUNCTIONS OF SEMICONDUCTOR FABRICATION EQUIPMENT AND COMPONENTS, SUCH AS VALVE, CRYO PUMP, AND VACUUM PUMP
Cancelled · October 14, 1999 · 75823321 ·