Machines and machine tools for microelectronics, microsystems technology, semiconductor and nanotechnology, namely, machines for processing integrated circuits, machines for fabricating micro- and nanostructures, machines for fabricating micro- and nanopatterns, machines for patterning and modifying micro- and nanostructures, machines for producing and processing quantum mechanical devices; Manufacturing machines for processing 1D nanoscale materials, namely, nanowires, nanorods, nanotubes an...