SKC
ceramic replacement parts of semi-conductor cleaning and drying machines, namely, force ring, edge ring, ring confinement cap, guide ring, rotation ring cover, water chuck, water clamp, robot arm, robot blade, hot arm, ceramic pipe, lift pin, ceramic screw, Si source ring, Si inner ring, Si slab, Si heat shield, wide pocket, shadow ring, base plate, lifter pin, quartz part, tube, boat; SiC wafers
Cancelled · June 24, 2013 · 85968300 ·