Semiconductor manufacturing machines; Machines for microfabricated devices, semiconductor devices and MEMS devices, namely, etching machines and semiconductor wafer processing machines, and parts therefor; Etching equipment, namely, etching machines for microfabricated devices, semiconductor devices, and MEMS devices

Microfabricated devices, namely, infrared sensors, force sensors, namely, motion and pressure sensors, and acceleration sensors; fluid flow controllers and chemical analyzers

Microfabricated devices, namely, infrared sensors, force sensors, namely, motion and pressure sensors; acceleration sensors; fluid flow controllers and chemical analyzers