LABORATORY RESEARCH, NAMELY, INVESTIGATING SAMPLES WITH AND WITHOUT SURFACE LAYERS BY USING ELLIPSOKETERS, POLARIMETERS AND REFLECTOMETERS WHICH UTILIZE ELECTOMAGNETIC RADIATION

EQUIPMENT, NAMELY, ELLIPSOMETER BASED APPARATUS FOR MEASURING THICKNESS, TEMPERATURE CAUSED EFFECTS, AND OPTICAL PROPERTIES OF SEMICONDUCTORS, DISK DRIVES, MAGNETIC DATA STORAGE MEDIA, OPTICAL DATA STORAGE MEDIA, THIN FILMS, MULTIPLE LAYER FILMS AND COATINGS ON SUBSTRATES, AND COMPUTER PROGRAMS NECESSARY FOR CONTROLLING THE ELLIPSOMETER BASED APPARATUS AND FOR ANALYZING ACQUIRED ELLIPSOMETRIC DATA

EQUIPMENT, NAMELY, ELLIPSOMETER BASED APPARATUS FOR MEASURINGTHICKNESS, TEMPERATURE CAUSED EFFECTS, AND OPTICAL PROPERTIES OFSEMICONDUCTORS, DISK DRIVES, MAGNETIC DATA STORAGE MEDIA, OPTICALDATA STORAGE MEDIA, THIN FILMS, MULTIPLE LAYER FILMS AND COATINGS ONSUBSTRATES, AND COMPUTER PROGRAMS NECESSARY FOR CONTROLLING THEELLIPSOMETER BASED APPARATUS AND FOR ANALYZING ACQUIRED ELLIPSOMETRICDATA