Electric and electronic and micro-mechanical and micro-electromechanical sensors and probes for non-optical microscopy, namely scanning probe microscopy, for measuring surface topography, height, electrical and magnetic surface properties, potentials and currents

Electric and electronic and micro-mechanical and micro-electromechanical sensors and probes for non-optical microscopy, namely scanning probe microscopy, for measuring surface topography, height, electrical and magnetic surface properties, potentials and currents