ULTRATECH/CNT
Atomic layer deposition machine comprised of a reaction chamber, precursor lines and a cabinet, all sold as a unit for performing atomic deposition layering and for use in applying atomic layer coating on various surfaces, namely, on gate dielectrics, gate electrodes, metal interconnects, diffusion barriers, DRAM, multilayer-capacitors, read heads, antireflection, optical filters, OLED layers, photonic crystals, transparent conductors, electroluminescence, solar cells, lasers, integrated opti...
Abandoned · July 22, 2016 · 87113513 ·