Etching machines used for manufacturing light emitting diodes (LEDs); atomic layer deposition (ALD) machines used for manufacturing light emitting diodes (LEDs); deposition machines used for manufacturing light emitting diodes (LEDs); apparatus in the nature of a machine for manufacturing organic light emitting diodes (OLEDs); etching machines used for manufacturing organic light emitting diodes (OLEDs); atomic layer deposition (ALD) machines used for manufacturing organic light emitting diod...