Cathodes and parts of cathodes, namely, end blocks, magnetic assemblies, electronic control panel, and process gas systems, namely, mass flow controllers, gas piping, and gas distribution manifold; cathode end blocks; cathode lid systems comprised of cathode end blocks, magnet bars, electronic controls and process gas systems, namely, mass flow controllers, gas piping and gas distribution manifold

Cathodes and parts of cathodes, namely, end blocks, magnetic assemblies, electronic control panel, and process gas systems, namely, mass flow controllers, gas piping, and gas distribution manifold; cathode end blocks; cathode lid systems comprised of cathode end blocks, magnet bars, electronic controls and process gas systems, namely, mass flow controllers, gas piping and gas distribution manifold