SPUTTERING COMPONENTS
Cathodes and parts of cathodes, namely, end blocks, magnetic assemblies, electronic control panel, and process gas systems, namely, mass flow controllers, gas piping, and gas distribution manifold; cathode end blocks; cathode lid systems comprised of cathode end blocks, magnet bars, electronic controls and process gas systems, namely, mass flow controllers, gas piping and gas distribution manifold
Registered · May 14, 2012 · 85624883 ·