Optical emission spectrometers; Optical emission spectrometers featuring plasma generators; Mass spectrometers featuring plasma generators; Mass spectrometers for analyzing semiconductor process gases; Mass spectrometers for use in semiconductor manufacturing; Optical emission spectrometers for analyzing semiconductor process gases; Optical emission spectrometers for use in semiconductor manufacturing; Ionization apparatus for mass spectrometry; Plasma generators for mass spectrometry; Ioniza...