SPEEDFAM-IPEC
Deionized water for use in preparing slurries containing abrasives, slurries containing abrasives and deionized water, slurries containing abrasives and chemicals and deionized water, and pad adhesives, for use in connection with lapping machines, free-abrasive machines, abrading machines, grinding machines, honing machines, polishing machines and chemical-mechanical polishing machines the purpose of said deionized water being to deliver said abrasives and chemicals to solid materials for sur...
Abandoned · May 21, 1999 · 75712067 ·