Silicon parts for use in semiconductor manufacturing; Silicon parts for use in semiconductor manufacturing, namely c-shroud rings, slotted rings, edge rings, and electrodes; Electrodes; Bonded silicon assemblies for use in semiconductor manufacturing; Silicon targets

Components of equipment for the manufacture, processing, and fabrication of semiconductors; Components of equipment for the manufacture, processing, and fabrication of semiconductors, namely, c-shroud rings, slotted rings, edge rings, mechanisms for sealing; Replacement parts for equipment for the manufacture, processing, and fabrication of semiconductors; Replacement parts for equipment for the manufacture, processing, and fabrication of semiconductors, namely, c-shroud rings, slotted rings,...

Silicon solar cell material for electricity generation; Silicon wafers; Bonded silicon assemblies for use in semiconductor manufacturing; Optical devices incorporating silicon and silicon carbide, namely, silicon mirrors, silicon lenses, and silicon windows; Silicon mirrors; Silicon targets; Optical transmission devices, namely, silicon mirrors, silicon lenses, silicon windows