Electronic chips, integrated circuits; electronic chips featuring integrated sensors; sensors being measuring apparatus other than for medical use, namely, pressure sensors, gas sensors, pollutant sensors, optical sensors, temperature sensors, heat sensors, hygrometers, humidity sensors, mass flow sensors, gas flow sensors, fluid flow sensors, differential pressure sensors; measuring instruments and apparatus, namely, flow meters; computer software for driving sensor hardware, sensor data pro...

sensor chips, sensor systems, devices, [and transmitters,] namely, relative humidity sensors, mass flow sensors, air flow sensors, gas flow sensors, differential pressure sensors, temperature sensors, liquid flow sensors, pressure sensors, gas sensors, [and radiation sensors;] industrial process control software

sensor chips, sensor systems, devices, and transmitters namely, relative humidity sensors, mass flow sensors, air flow sensors, gas flow sensors, differential pressure sensors, temperature sensors, liquid flow sensors, pressure sensors, gas sensors, and radiation sensors; industrial process control software