SCANNERTEMP
Apparatus and instruments for physics, namely, wafer temperature measurement devices, in situ temperature sensors for
semiconductor manufacturing, lithography scanner temperature monitoring instruments for dry, immersion, and Extreme
Ultraviolet (EUV) systems, scientific instruments for recording temporal and spatial wafer temperature data; Electronic sensors for
temperature measurement within semiconductor lithography systems; environmental data acquisitio...
Pending · June 5, 2025 · 99220330 ·