PROMETRIX
Computer-Based System for Evaluating the Performance of Semiconductor Wafer Processing Equipment Comprised of Resistivity Test and Mapping Systems and Lithography Characterization Systems Comprised of Some or All of the Following: Programmable Computer, Instrumentation Interface, Graphics Terminal, Graphics Printer, Resistivity Test Unit, and Programmable x-y Prober with Optics and Probe Card
Registered · March 22, 1984 · 73471545 ·