HARDWARE AND SOFTWARE SYSTEMS COMPRISING COMPUTERS, COMPUTER SOFTWARE, ELECTRONIC HARDWARE AND MECHANICAL HARDWARE FOR MICROPOSITIONING CONTROL, NAMELY, THE DESIGN, MANUFACTURE AND APPLICATION OF MICROPOSITIONING CONTROL IN PRECISION ACTUATORS, CONTROL SYSTEMS FOR PHOTONICS, DIGITAL FLOW CONTROL, SEMICONDUCTOR TEST AND INSPECTION [, AND BIOMEDICAL MICROSCOPY AND SCANNING SYSTEMS ]

Hardware and software systems comprising computers, computer software, electronic hardware and mechanical hardware for micropositioning control, namely, the design, manufacture and application of micropositioning control in precision actuators, control systems for photonics, digital flow control, semiconductor test and inspection, and biomedical microscopy and scanning systems