Micro-electro-mechanical systems (MEMS) mirrors and mirror arrays, namely, optical mirrors and optical mirror arrays; optical communications and networking apparatus comprised of MEMS mirrors and mirror arrays; digital imaging apparatus comprised of semiconductor-controlled micromirrors; optical shutters; optical switches; optical transceivers; circuit boards; electronic chips for the manufacture of integrated circuits; semiconductor chips; integrated circuits; integrated electronic circuits ...

Micro-electro-mechanical systems (MEMS) mirrors and mirror arrays, namely, optical mirrors and optical mirror arrays; optical communications and networking apparatus comprised of MEMS mirrors and mirror arrays; digital imaging apparatus comprised of semiconductor-controlled micromirrors; optical shutters; optical switches; optical transceivers; circuit boards; electronic chips for the manufacture of integrated circuits; semiconductor chips; integrated circuits; integrated electronic circuits ...

Micro-electro-mechanical systems (MEMS) mirrors and mirror arrays, namely, optical mirrors and optical mirror arrays; optical communications and networking apparatus comprised of MEMS mirrors and mirror arrays; digital imaging apparatus comprised of semiconductor-controlled micromirrors; optical shutters; optical switches; optical transceivers; circuit boards; electronic chips for the manufacture of integrated circuits; semiconductor chips; integrated circuits; integrated electronic circuits ...