POLARIZATION MAPPER (PMAP)
Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software for use in analyzing data received from an image capture tool and combined in-situ imaging objectives and multiple polarizing elements for use in exposing photographically prepared patterns and images that are used for measuring and adjusting projection imaging systems used in the manufacture of integrated circuits
Abandoned · September 18, 2006 · 76666231 ·
