Apparatus and instruments in the field of plasma technology and semiconductor processing; apparatus and instruments for handling and plasma treatment of semiconductor wafers, plastics or other materials; robotic wafer handlers; plasma cluster tools; plasma research apparatus and instruments; computer hardware and software for use therewith; and parts and fittings for the aforesaid goods

PLASMA ETCHING AND DEPOSITION SYSTEMS, COMPRISING COMPUTERS, MICROPROCESSORS, AUTOMATIC CONTROLS, HIGH VACUUM CHAMBERS AND HIGH VACUUM PUMPING UNITS, ELECTRODES AND HIGH FREQUENCY PLASMA GENERATORS AND ASSOCIATED ANALYZERS USED IN THE MANUFACTURE OF INTEGRATED CIRCUITS, ELECTRONIC AND OPTICAL EQUIPMENT