PLASMALAB
PLASMA ETCHING AND DEPOSITION SYSTEMS, COMPRISING COMPUTERS, MICROPROCESSORS, AUTOMATIC CONTROLS, HIGH VACUUM CHAMBERS AND HIGH VACUUM PUMPING UNITS, ELECTRODES AND HIGH FREQUENCY PLASMA GENERATORS AND ASSOCIATED ANALYZERS USED IN THE MANUFACTURE OF INTEGRATED CIRCUITS, ELECTRONIC AND OPTICAL EQUIPMENT
Cancelled · October 15, 1986 · 73625391 ·