Optical metrology apparatus and instrumentation, namely metrology tools for 2D and 3D visualization and measurement of the deformation motion and strain field in advanced electronic packages, system-on-chip and MIEMS/MOEMS (micro-electro-mechanical systems I micro-opto-electromechanical systems) product engineering; computer software used for image acquisition, stressing control, image processing, image correlation, deformation motion analysis, strain testing and strain measurement in the ele...