Instruction relating to operation and design of semiconductor manufacturing machines and systems

Measuring and testing machines and instruments, namely, temperature indicators, pressure gauges, electrical circuit testers; optical inspection apparatus for inspection of semiconductor materials, namely, semiconductor wafers, reticles, and photomasks; testing apparatus for testing photomasks, namely, testing apparatus for inspecting defects in patterns on photomasks to be transferred to semiconductor wafers; testing apparatus for testing wafers, namely, testing apparatus for inspecting defec...

Semiconductor manufacturing machines

Semiconductor manufacturing machines

SEMI-CONDUCTOR MANUFACTURING APPARATUS, NAMELY, ELECTRON BEAM EXPOSURE MACHINES, EPITAXIAL REACTORS, CHEMICAL VAPOR DEPOSITION MACHINES, PHYSICAL VAPOR DEPOSITION MACHINES, PLASMA ETCHERS, ION IMPLANTERS, AND CHEMICAL MECHANICAL POLISHERS, CHEMICAL VAPOR DEPOSITION PROCESSING CHAMBERS, MASK INSPECTION MACHINES, ULTRA HIGH VACUUM PUMPS AND WAFER-HANDLING CLUSTER TOOLS

Computer application software for mobile phones, portable media players, handheld computers, personal digital assistants (PDAs), tablet computers, namely, software containing maintenance manual and maintenance directions for semiconductor manufacturing machines and systems; computer software containing maintenance manual and maintenance directions for semiconductor manufacturing machines and systems

Instruction relating to operation and design of semiconductor manufacturing machines and systems