Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconductor wafer processing equipment; Semiconductor wafer processing machines; replacement parts and fittings for all of the aforementioned goods

Metrology apparatus for measurement of semiconductor wafers; Metrology apparatus for integration with other process equipment for the measurement of semiconductor wafers; Optical metrology apparatus for measurement of semiconductor wafers; Optical metrology apparatus for integration with other process equipment for the measurement of semiconductor wafers; Measuring apparatus for measuring semiconductor wafers; Weighing apparatus and instruments