NANOMANUFACTURING TECHNOLOGY
Semiconductor wafer processing equipment and components, namely-- epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, measuring and monitoring tools, and chemical mechanical polishers; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers
Abandoned · January 3, 2006 · 78783924 ·