Micro electro mechanical systems (MEMS) structures, namely, inductors, relays, switches, connectors, electrodes, lasers and scanners; integrated circuits; solid state integrated circuits; solid state electrical integrated circuits, mass spectrometers and components therefor, namely, chips, miniature mass spectrometers and components therefor, namely, chips; measurement apparatus and devices, namely, MEMS devices for the measurement of constituents of chemical compounds; sensor devices, namely...

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