machines and structural parts therefor, for the production, treatment, transport and processing of electronic components, especially semiconductors, in the field of microelectronic, medical technology, biotechnology, semiconductor technology and microsystems technology; machines and structural parts therefor, for the production, treatment and processing of semiconductors; machines and structural parts therefor for treatment of surfaces of electronic components, especially wafers

Machines for manufacturing and testing of chips, namely, micro electro mechanical systems (MEMS)