machines and structural parts therefor, for the production, treatment, transport and processing of electronic components, especially semiconductors, in the field of microelectronic, medical technology, biotechnology, semiconductor technology and microsystems technology; machines and structural parts therefor, for the production, treatment and processing of semiconductors; machines and structural parts therefor for treatment of surfaces of electronic components, especially wafers

Education, namely, classes, providing of training, arranging and providing seminars, workshops and symposia, providing non-downloadable electronic publications in the field of manufacturing and testing chips, namely, micro electro mechanical systems (MEMS), all aforesaid services in the field of manufacturing and testing chips, namely, micro electro mechanical systems (MEMS)