microsystems for fluid handling, integrated microsystems, and components for microsystems, namely, flowchannels, pumps, valves, flowmeters, filters, fluid interconnects, gears, rotors, and assemblies for fluid handling; enclosures for microsystems, namely, cavities, molds, lids, and bonding surfaces; microsystem interconnects, namely, electrical connectors, mechanical connectors, plugs, pins, and optical fiber connectors; precision micromechanical components and modules, namely, gear trains f...