MEGACLEAN
Semiconductor wafer processing machines, operational software, and components; namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, wafer cleaning equipment and chemical mechanical polishers; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers
Abandoned · July 30, 2002 · 78148864 ·