MASKLESS MESOSCALE
MACHINES THAT UTILIZE A LASER ENERGY SOURCE FOR MANUFACTURING PASSIVE AND ACTIVE ELECTRONIC PARTS, NAMELY ELECTRONIC SENSORS; ELECTRONIC CIRCUITRY; DIAGNOSTIC AND THERAPEUTIC BIO-MEDICAL PRODUCTS; MICRO ELECTRIC MECHANICAL SYSTEMS FOR USES INCLUDING SWITCHES, SENSORS, FILTERS, ACTIVATORS, PUMPS, MICRO-FLUIDICS, AND PHOTO-OPTICS; BATTERIES; FUEL CELLS; AND BIO-SENSORS
Abandoned · August 28, 2001 · 76306164 ·