Machines for microlithography and machines for use in the fields of electronics, integrated circuits, semiconductors, magnetic domain memory and integrated optical systems, as well as parts of the afore-mentioned goods, not included in other classes, namely, machines for use in the manufacture, fabrication and treatment of electronics, micro-lithography products, photolithographic masks, semiconductors, integrated circuits, computer wafers, computer processors, computer memory chips, magnetic...

Computer software for use in simulation, development and optimization of lithography processes for manufacture of devices such as integrated circuits, micro machines, magnetic heads, and flat panel displays, and for tools such as masks and reticles, for use in such processes