Semiconductors, integrated circuits, circuit boards, microcomputers, and micro controllers; computer programs and firmware for monitoring and controlling electronic sensors and transducers and microelectronic mechanical systems (MEMS); electronic sensors, namely, accelerometers, magnetometers, gyroscopes and combinations of the three, mechanical systems (MEMS) modules comprised of electronic and/or inertial sensors packaged with integrated circuitry; electronic sensors for acceleration, incli...

Semiconductors, integrated circuits, circuit boards, microcomputers, and micro controllers; computer programs and firmware for monitoring and controlling electronic sensors and transducers and microelectronic mechanical systems (MEMS); electronic sensors, namely, accelerometers, magnetometers, gyroscopes and combinations of the three, mechanical systems (MEMS) modules comprised of electronic and/or inertial sensors packaged with integrated circuitry; electronic sensors for sensing acceleratio...