Thin film deposition apparatus, namely, semiconductor manufacturing machine; Plasma chemical vapor deposition apparatus, namely, semiconductor manufacturing machine; Chemical vapor deposition apparatus for manufacturing LCD, PDP, semiconductor, solar cells, OLED and LED; Sputtering apparatus for manufacturing LCD, PDP, semiconductor, solar cells, OLED and LED; Etching apparatus for manufacturing LCD, PDP, semiconductor, solar cells, OLED and LED; Evaporation deposition machine for manufacturi...