Thin film deposition apparatus being semiconductor manufacturing machine; Plasma chemical vapor deposition apparatus being semiconductor manufacturing machine; Chemical vapor deposition apparatus for manufacturing LCD, PDP, semiconductor, solar cells, OLED and LED; Sputtering apparatus for manufacturing LCD, PDP, semiconductor, solar cells, OLED and LED; Etching apparatus for manufacturing LCD, PDP, semiconductor, solar cells, OLED and LED; Evaporation deposition machine for manufacturing LCD...