SEMICONDUCTOR MANUFACTURING MACHINES; SEMICONDUCTOR MANUFACTURING SYSTEMS COMPRISED OF FAST RAMP HEATERS, RAPID COOLING UNITS AND TEMPERATURE CONTROLLERS

machines for manufacturing semiconductors, machines for manufacturing semiconductor diffusion furnaces

computer programs and information recorded on computer-readable media for information search, retrieval storage and indexing on worldwide global computer networks

computer software for transferring files between computer systems using various file transfer protocols

Electronic storage of files and documents and file transfer