Metal organic vapor phase deposition system, namely, a gas distribution system used in the manufacture of semiconductor devices, comprised of system-dependent vacuum components, namely, pumps, and other machined components, namely, tube fittings, viewports, gaskets, injector plates, adjustable viewport tubes, screen and viewport spacers, injector rings, and weldment flanges; all of the aforementioned sold as a unit

GAS DISTRIBUTION SYSTEM COMPRISED OF SYSTEM DEPENDENT VACUUM COMPONENTS AND OTHER MACHINED COMPONENTS, NAMELY, SWAGELOCK FITTINGS, VIEWPORTS, GASKETS, INJECTOR PLATES, SCREENS, ADJUSTABLE VIEWPORT TUBES, SCREEN AND VIEWPORT SPACERS, INJECTOR RINGS, AND WELDMENT FLANGES, SOLD AS A UNIT, FOR PRODUCING COMPOUND SEMICONDUCTORS

gas distribution system comprised of system dependent vacuum components and other machined components, namely, swagelock fittings, viewports, gaskets, injector weldment plates, injector plates, screens, adjustable viewport tubes, screen and viewport spacers, injector rings, and weldment flanges, sold as a unit, for producing compound semiconductors