FIJI
183 Atomic layer deposition systems for a variety of coating applications, namely, gate dielectrics, gate electrodes, metal interconnects, diffusion barriers, DRAM, multilayer-capacitors, read heads, antireflection, optical filters, OLED layers, photonic crystals, transparent conductors, electroluminescence, solar cells, lasers, integrated optics, MEMS, etch resistance, hydrophobic / antistiction, blade edges, molds and dies, solid lubricants, anti corrosion, inside pores, nanotubes, around p...
Registered · October 19, 2009 · 77851927 ·