FATHOM
Inspection and test equipment for the semiconductor industry, namely, wafer inspection equipment, reticle inspection equipment, defect detection equipment, defect review equipment, defect classification equipment, nanotopography measurement equipment, wafer flatness measurement equipment, surface profiling equipment, film thickness measurement equipment, critical dimension measurement equipment, and microscopes, for use in the manufacturing and testing of semiconductors
Cancelled · December 11, 2001 · 76347903 ·