Computer software, namely, a real-time semiconductor fabric-wide wafer tool software application for advanced process fault detection used to monitor information from tooling on the manufacturing line

Computer software, namely, a real-time semiconductor fabric-wide wafer tool software package for advanced process fault detection used to monitor information from tooling on the manufacturing line.; Computer software, namely, a real-time semiconductor fabric-wide wafer tool software package for advanced process fault detection used to monitor information from tooling on the manufacturing line.