Recorded computer software used for running, tracking, and providing feedback for on-tool metrology measurements; recorded computer software used for analysis of Big Data generated from semiconductor wafer processing and metrology, inspection, and review equipment; recorded computer software for creating machine learning algorithms for analysis of Big Data generated from semiconductor wafer processing and metrology, inspection, and review equipment

Recorded computer software used for running, tracking, and providing feedback for on-tool metrology measurements; recorded computer software used for analysis of Big Data generated from semiconductor wafer processing and metrology, inspection, and review equipment; recorded computer software for creating machine learning algorithms for analysis of Big Data generated from semiconductor wafer processing and metrology, inspection, and review equipment

Dust separators; air filters for motors and engines