EPISIL
WEAR RESISTANT, CHEMICALLY RESISTANT, AND HEAT RESISTANT COATED GRAPHITE SUBSTRATES; NAMELY, ELECTRICALLY HEATED HIGH PURITY, PRECISION MACHINED GRAPHITE SUSCEPTORS COMPRISING SEMI-CONDUCTOR WAFER HOLDERS WITH HIGH INTEGRITY, SILICON CARBIDE COATINGS
Cancelled · September 30, 1985 · 73560651 ·