EPICYCLON
Chemical vapor deposition system for use in the manufacture of semiconductors, namely, an electrothermic apparatus that produces coating by reacting vapor-phase chemicals; physical vapor deposition system for use in the manufacture of semiconductors, namely, an electrothermic apparatus that produces coating by vaporizing coating materials; rapid thermal processing system for use in the manufacture of semiconductors, namely, an electrothermic apparatus that subjects an item under treatment to ...
Abandoned · February 24, 1998 · 75439365 ·