DRIVETHRU
Magnetic fluid rotary feedthrough system, namely, a rotating shaft incorporating magnetic fluid seal, bearings, integrated motor and sensors, for use in controlled rotation, indexing or positioning attached to a vacuum chamber as part of an integrated motion control system or semi-conductor processing operation in the field ion implantation, chemical vapor deposition, metal oxide chemical vapor deposition, deposition by sputtering, robotics and rotary handling mechanisms
Cancelled · October 21, 1999 · 75828586 ·