MACHINES FOR COATING WORKPIECES, ESPECIALLY FLAT, DISK-SHAPED SUBSTRATES OF ORGANIC, MINERAL OR METALLIC MATERIALS WITH WEAR RESISTANT, ELECTRICALLY CONDUCTIVE, ELECTRICALLY INSULATING, AND OPTICALLY ACTIVE COATINGS, AS WELL AS THE STRUCTURAL PARTS IN THE NATURE OF SPUTTERING AND/OR PLASMA SOURCES FOR COATING THE MACHINED WORKPIECES; MACHINES FOR THE PHOTOCHEMICAL DEVELOPMENT OF WORKPIECES, IN PARTICULAR, FLAT, DISK FORMING SUBSTRATES, NAMELY, PROVIDING PHOTORESISTANT COATINGS