[Scanning electron microscopes; semiconductor wafer evaluation and inspection apparatus for use in semiconductor manufacturing and lithography; semiconductor and integrated circuit evaluation and inspection apparatus for use in semiconductor manufacturing, integrated circuit manufacturing, and lithography;] software for evaluation and inspection of semiconductors and semiconductor wafers

Metrology software for use in the manufacturing of semiconductors; software for the evaluation and inspection of semiconductors and semiconductor materials; software for use in processing semiconductor wafers, software for analyzing, measuring, and contouring based on electron microscope images and data