CRYOTEMP
Apparatus and instruments for physics, namely, in-situ semiconductor process temperature measurement wafers equipped with embedded electronic temperature sensors for monitoring wafer level thermal profiles inside semiconductor process chambers, particularly plasma etch chambers; Diagnostic equipment for research laboratory use, namely, temperature sensing wafers for measuring wafer temperature and environmental conditions during cryogenic plasma etch processes; Measures for measuring temperat...
Pending · June 20, 2025 · 99244602 ·