MACHINES AND STRUCTURAL PARTS THEREFOR, FOR THE PRODUCTION, TREATMENT, TRANSPORT AND PROCESSING OF ELECTRONIC COMPONENTS, ESPECIALLY SEMICONDUCTORS, IN THE FIELD OF MICROELECTRONIC MEDICAL TECHNOLOGY, BIOTECHNOLOGY, SEMICONDUCTOR TECHNOLOGY AND MICROSYSTEMS TECHNOLOGY; MACHINES AND STRUCTURAL PARTS THEREFOR, FOR THE PRODUCTION, TREATMENT AND PROCESSING OF SEMICONDUCTORS; MACHINES AND STRUCTURAL PARTS THEREFOR, FOR TREATMENT OF SURFACES OF ELECTRONIC COMPONENTS, ESPECIALLY WAFERS