Micromachined miniature sensors [ and actuators ], single or in arrays, namely, accelerometers, [ gyroscopes, angular rate sensors, pressure sensors, electromagnetic micro-relays, optical switches and switch arrays, steerable mirror arrays, variable optical attenuators; micromachined finely structured elements, namely, microfluidic elements for transporting, ejecting, separating and mixing micro-volumes of liquids, micro-electrode arrays for conducting electrical energy in a micro-area, micr...