sensor chips, sensor systems, devices, [and transmitters,] namely, relative humidity sensors, mass flow sensors, air flow sensors, gas flow sensors, differential pressure sensors, temperature sensors, liquid flow sensors, pressure sensors, gas sensors, [and radiation sensors; industrial process control software]

sensor chips, sensor systems, devices, and transmitters namely, relative humidity sensors, mass flow sensors, air flow sensors, gas flow sensors, differential pressure sensors, temperature sensors, liquid flow sensors, pressure sensors, gas sensors, and radiation sensors; industrial process control software