[ Scanning probe microscopes, scanning electronic microscopes and atomic force microscopes; ] electric and electronic and micro-mechanical and micro-electromechanical sensors and probes for non-optical microscopes and optical near field microscopes; [ electric and electronic and micro-mechanical and micro-electromechanical instruments and apparatus for detection of pressure, gases, temperature, intensity of light, forces, acceleration, vibrations, nick angle, humidity, distances, speed, rough...