Apparatus and instruments for thin film processing, namely, thin film processing machines; apparatus and instruments for thin film processing, namely, power operated atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, and atomic layer epitaxy; power operated etch tools for atomic layer etching and power operated cluster tools for etching; apparatus and instruments for thin film processing, namely, power operated atomic layer deposition tools for ...

Apparatus and instruments for thin film processing, namely, atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching; apparatus and instruments for thin film processing, namely, atomic layer deposition tools for plasma atomic layer deposition, thermal atomic layer deposition, atomic layer epitaxy, etch tools for atomic layer etching and cluster tools for etching wi...