system for the design and manufacture of integrated circuits and the transfer and storage of data, graphics, computer programs and information, consisting essentially of laser pattern generator, mask aligner, housing modules containing chip processing apparatus, chip testing, assembling and packaging apparatus, cleanroom, service module, compiler workstation, airconditioning, heating, humidity control, filtration and vacuum apparatus; computer hardware; and parts thereof for the aforementione...

distribution and installation of fabrication facilities, including equipment for the manufacture of application specific intgrated circuits